Olympus FR3200 wafer inspection : Olympus Integrated Technologies America (Olympus-ITA), leader in quality inspection and defect review systems, will demonstrate its FR3200 200 and 300mm Wafer Inspection and Automated Defect Review System at SEMICON West 2007. In addition to the broad range of visible light imaging methods, the system integrates a new Broadband DUV technology for better material contrast and characterization on advanced films and materials. The new multiple band DUV optics provide imaging in single or combined UV and DUV bands. With the advent of many new materials in front-end processing, this flexible multiple band DUV observation method will be very powerful in characterization of advanced material defects.
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