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Nikon 45nm production immersion scanner

Ralf Jurrien : 2007-03-09 15:34:00
Nikon 45nm production immersion scanner : Nikon Corporation has shipped the world’s first immersion lithography system capable of 45 nm production. The NSR-S610C, an ArF immersion scanner with the industry’s highest projection lens NA of 1.30, shipped to a major IC manufacturer. The system is targeted for mass production of 45 nm devices and can also be used for development of 32 nm devices and double patterning. The NSR-S610C was selected over the competition because of its early market introduction and proven ability to print immersion exposures with no immersion-induced defects and overlay equivalent or better than dry systems. The Nikon NSR-S610C builds on Nikon’s immersion expertise.






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