Nikon D7100 Canon EOS Rebel T5i Nikon D3300 Canon EOS 1200D Sony A5000 Nikon D4S
Nikon D7100 Canon EOS Rebel T5i Nikon D3300 Canon EOS 1200D Sony A5000 Nikon D4S
LetsGoDigital for Sale
  News Headlines Apple Canon Casio Fujifilm HTC LG Nikon Nokia Olympus Panasonic Pentax Ricoh Rollei Samsung Sony  
Lets Go Digital
 
     
Powered by True
Counted by OneStat.com
Nikon 45nm production immersion scanner
Ralf Jurrien : March 9th 2007 - 15:34 CET
Digital Camera Review Test Appareil Photo Numerique Prueba camara digital Digitale Camera Test Dijital Kamera Incelemeleri Digitalkamera Test Digitalkamera
NikonNikon 45nm production immersion scanner : Nikon Corporation has shipped the world’s first immersion lithography system capable of 45 nm production. The NSR-S610C, an ArF immersion scanner with the industry’s highest projection lens NA of 1.30, shipped to a major IC manufacturer. The system is targeted for mass production of 45 nm devices and can also be used for development of 32 nm devices and double patterning. The NSR-S610C was selected over the competition because of its early market introduction and proven ability to print immersion exposures with no immersion-induced defects and overlay equivalent or better than dry systems. The Nikon NSR-S610C builds on Nikon’s immersion expertise.
Nikon 45nm production immersion scannerNikon production immersion scanner
Proprietary Nikon Local Fill Technology is proven to eliminate scanner-induced immersion defects with no bubbles, water spots, or backside wafer contamination. This technology also eliminates evaporation of the immersion fluid, providing a critical advantage in preventing immersion related overlay problems. Nikon’s Tandem Stage utilizes two stages with different functions to increase throughput, improve accuracy, and enhance long-term stability.

Nikon NSR-S609B production immersion scanner
“2006 was a great year for Nikon’s immersion program,” said Kazuo Ushida, President of the Nikon Precision Equipment Company. “In January, we shipped the world’s first production immersion system, the NSR-S609B. Throughout the year, we achieved wins at several accounts by demonstrating our immersion leadership through evaluations and direct comparisons with our competitor’s tool. And, after a one-year, head-to-head evaluation in a customer fab, we secured the immersion business at a major IC manufacturer. The shipment of the NSR-S610C further cements our leadership in immersion technology.”

About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,800 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America.

   Next  Portable video and picture player from Smartparts
   Previous  Fujimoto SHP5080 digital lab system
   News by brand:Nikon
   News by category:Scanners
   News by brand and category:Nikon Scanners
   Canon EOS 700D - $749.00
   Nikon D7100 - $1146.95
   Panasonic Lumix DMC TZ40 - $339.00
   Sony CyberShot DSC HX300 - $398.00
   Canon IXUS 255 HS - $176.80
   Panasonic Lumix DMC TZ35 - $169.00
   Canon PowerShot SX280 HS - $199.00
   Canon EOS 1100D - $326.49
   Sony CyberShot DSC HX50V - $348.00
   Canon PowerShot SX510 HS - $229.00


LetsGoDigital digital camera magazine
Latest Nikon announcements
Nikon Coolpix S810c
Nikon 1 V3 test photos
Nikon Coolpix P600
Nikon Coolpix P530
Nikon V3
Nikon 1 V3 system camera
Nikon 1 V3
1 Nikkor VR 70-300mm f/4.5-5.6 telephoto lens
1 Nikkor VR 10-30mm f/3.5-5.6 PD-Zoom lens
1 Nikkor zoom lenses
Nikon Coolpix P340
Nikon Coolpix L29
Nikon D4s sample photos
Nikon Coolpix L330
Nikon Coolpix L30
 
Twitter LetsGoDigital
Latest news headlines
Sony Xperia Z2
Sony Xperia Z2 tablet
Nikon 1 J4
Nikon Coolpix S810c
Samsung Galaxy Ace Style Android phone
Panasonic Lumix GH4
Nokia X smartphones
Nokia Asha 230
Nokia 220
Nikon 1 V3 test photos
Canon PowerShot G1 X Mark II
HTC Desire 310
Canon PowerShot SX600 HS
Canon IXUS 265 HS
Nikon Coolpix P600
   
CanonCasioFujifilmNikonOlympusHTCSamsungSonyPanasonicNokia
  Accessories Android Apps Camcorders Digital cameras Mobile phones Smartphones Software Tablets   CES CeBIT Gadgets IFA Photokina PMA